This is actually the third 12″ source made by Meaglow Ltd, one unit was made many years ago with an older design, however a newer unit has been undergoing preliminary tests by a customer during the pandemic. That unit is a 3000 watt RF unit. The current unit, our 75th, is going to our agent, Paultec Co. Ltd., in South Korea and will be trialled with a customer there. The trial unit, shown in the pictures, is for 900 watt operation and will help customers test the uniformity of the sources for the full 12″ diameter area of their wafers.
Meaglow’s hollow cathode plasma sources are well known because they are an effective solution to the oxygen contamination seen from many ICP and microwave legacy plasma sources, which suffer from the plasma attacking the dielectric windows. Meaglow staff have recently published a paper in the journal Coatings, which provides a review of this problem.
