SERIES 50 HOLLOW CATHODE
OUR PRODUCTS
ABOUT HOLLOW CATHODES
Unlock Greater Potential for your ALD, ALE or CVD System by using Meaglow hollow cathode plasma sources.
Hollow cathode plasma technology is the ‘go to’ solution for high quality nitride layers. Meaglow’s hollow cathode plasma sources offer substantial reduction in oxygen contamination.
Most Commonly our customers require custom solutions, so many of our plasma sources are made to order. There are some standard Meaglow hollow cathode plasma source offerings. The series 50 is one of our most popular sources, and is mounted on an NW-50 flange (though the equivalent conflat arrangement is also available).
Our Plasma Sources have been used with Ammonia, Argon, Chlorine, Hydrogen, Nitrous Oxide, Oxygen, Nitrogen, and other gases too.
Conversions of existing systems is also possible, and we provide some white papers for the more common conversions that we have performed. To date the largest source developed by Meaglow was for a 12″, 3000 watt system, though we have consulted for larger systems.
With the new industry paradigm – the advent of ALD and newer materials – better solutions are required. Meaglow Ltd has developed a set of simple designs that have allowed the successful adoption of hollow cathode plasma sources in ALD systems, overcoming some of the limitations of the old technologies. The Meaglow solution is enabling the Next Generation of equipment solutions.
SOME MEAGLOW CLIENTS
ISAC (8 sources)
Okyay Enerji (6 sources)
National Taiwan University (5 sources)
SeoulTech University (4 sources)
US Naval Research Laboratories (3 sources)
Hanyang University, South Korea (3 sources)
ALD Nanosolutions (3 sources)
CN1 (3 sources)
NASA Goddard Flight Space Center (3 sources)
NASA Jet Propulsion Laboratories (2 sources)
The Indian Institute of Technology, Bombay (2 sources)
Lawrence Berkeley Laboratories (2 sources)
University of Texas, Dallas (2 sources)
VST Services
Boston College
Bilkent University
Montreal Polytechnique
NIST
The University of Connecticut
Linkoping University, Sweden
Paultec
California Institute of Technology
Ben-Gurion University of the Negev
Otto-Von-Guericke-Universitat Magdeburg
The University of Liverpool
University of Colorado, Boulder
Louisiana State University
Many others!