OUR PRODUCTS

SERIES 50 HOLLOW CATHODE

UHV SERIES HOLLOW CATHODE

LARGE AREA HOLLOW CATHODE

FOR THERMAL ALD

MEAGLOW REACTOR

SERIES 16 HOLLOW CATHODE

ABOUT HOLLOW CATHODES

Unlock Greater Potential for your ALD, ALE or CVD System by using Meaglow hollow cathode plasma sources.

Hollow cathode plasma technology is the ‘go to’ solution for high quality nitride layers. Meaglow’s hollow cathode plasma sources offer substantial reduction in oxygen contamination.
Most Commonly our customers require custom solutions, so many of our plasma sources are made to order. There are some standard Meaglow hollow cathode plasma source offerings. The series 50 is one of our most popular sources, and is mounted on an NW-50 flange (though the equivalent conflat arrangement is also available).

Our Plasma Sources have been used with Ammonia, Argon, Chlorine, Hydrogen, Nitrous Oxide, Oxygen, Nitrogen, and other gases too.

Conversions of existing systems is also possible, and we provide some white papers for the more common conversions that we have performed. To date the largest source developed by Meaglow was for a 12″, 3000 watt system, though we have consulted for larger systems.
With the new industry paradigm – the advent of ALD and newer materials – better solutions are required. Meaglow Ltd has developed a set of simple designs that have allowed the successful adoption of hollow cathode plasma sources in ALD systems, overcoming some of the limitations of the old technologies. The Meaglow solution is enabling the Next Generation of equipment solutions.

SOME MEAGLOW CLIENTS

ISAC (8 sources)

Okyay Enerji (6 sources)

National Taiwan University (5 sources)

SeoulTech University (4 sources)

US Naval Research Laboratories (3 sources)

Hanyang University, South Korea (3 sources)

ALD Nanosolutions (3 sources)

CN1 (3 sources)

NASA Goddard Flight Space Center (3 sources)

NASA Jet Propulsion Laboratories (2 sources)

The Indian Institute of Technology, Bombay (2 sources)

Lawrence Berkeley Laboratories (2 sources)

University of Texas, Dallas (2 sources)

VST Services

Boston College

Bilkent University

Montreal Polytechnique

NIST

The University of Connecticut

Linkoping University, Sweden

Paultec

California Institute of Technology

Ben-Gurion University of the Negev

Otto-Von-Guericke-Universitat Magdeburg

The University of Liverpool

University of Colorado, Boulder

Louisiana State University

Many others!

BROCHURES

Large Area Hollow Cathodes

Series 16 Mini Plasma Source

Thermal to Plasma ALD Conversion

UHV Series Hollow Cathode

50 Series Hollow Cathode

CONTACT US

MEAGLOW Ltd.

2400 Nipigon Road
Thunder Bay, Ontario, P7C 4W1
Canada

Mailing Address:
P.O. Box 26001,
RPO Memorial,
Thunder Bay, ON, P7B 0B2
Canada.

Email : info@meaglow.com

Call us today:

+1 807-252-4391

office hours :

Monday - Friday : 9:00am - 5:00pm