Meaglow technical staff have published a paper entitled: “Recent Advances in Hollow Cathode Technology for Plasma-Enhanced ALD — Plasma Surface Modifications for Aluminum and Stainless-Steel Cathodes” in the journal “Coatings”. An early version of the paper can be accessed at the journal website, here.
The paper provides a brief review of oxygen contamination from ICP and microwave legacy sources, but also provides details of the operation of the hollow cathode gas plasma sources now widely used by the ALD community.