Dr. Eran Edri of Ben-Gurion University of the Negev has the first Meaglow hollow cathode source in Israel. Eran was formally from Lawrence Berkeley National Laboratories in the US, where he used one of our plasma sources there for the near room temperature ALD of silicon oxide. Several of Eran’s papers are listed on our website at our journal publication page.
Initial tests with the plasma source have gone well. A commercial ALD system was converted to use with the hollow cathode, the second of this particular brand. Meaglow has converted many of the popular ALD brands to use with its sources, including thermal systems. Among other advantages, the Meaglow sources offer lower oxygen contamination for nitride films. See our brochures page here.
(September 7, 2018)