#ALD | Meaglow Hollow Cathode Plasma Sources

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Why use hollow cathode technology instead of ICP or CCP?

MeaglowAdmin - 27 April 2026 0

Compound Semiconductor Integration in the Silicon Industry – Dudes, it’s already...

MeaglowAdmin - 16 August 2025 0

The UNSW Hoex Group in Australia Convert to a Hollow Cathode...

MeaglowAdmin - 31 January 2023 0

UT Dallas report more high-quality Silicon Nitride grown with one of...

MeaglowAdmin - 22 January 2021 0

Louisiana State University Progress Their New ALD System

MeaglowAdmin - 21 October 2020 0

New Hollow Cathode Plasma Sources Installed at Hanyang University, South Korea

MeaglowAdmin - 8 July 2020 0

Excellent Optical Results for GaN grown at 200 C by Hollow...

MeaglowAdmin - 16 October 2019 0

High Radical Flux Hollow Cathode Shows Another Advantage for ALD Film...

MeaglowAdmin - 27 June 2019 0

Hollow Cathode Plasma Sources – a wider operating pressure range than...

MeaglowAdmin - 24 April 2019 0

New Hollow Cathode Plasma Source Designs Provide Better Quality Films

MeaglowAdmin - 7 March 2019 0

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