The parts are almost ready for the conversion of a capacitively coupled plasma (CCP) source to hollow cathode operation for an ALD system in Europe. This hollow cathode will be integrated in a Beneq system (Disclaimer: Meaglow is not affiliated with or endorsed by, or sponsored by, Beneq. That our solutions work well with their equipment is wholly the result of our own expertise and advanced understanding of plasma sources. Beneq may be a trademarked name, but is unrelated to Meaglow Ltd.) and is the second Beneq system that we will have converted. The first unit was a NASA Jet Propulsion Laboratory (JPL) unit that shorted during every attempt at plasma based TiN deposition with the original CCP source. After the Meaglow conversion the system could work continuously for many months without a system clean needed and is described as a “workhorse” by by JPL staff.
Meaglow has expertise in the conversion of various brand name ALD systems and customizes its plasma sources for various situations, including home made ALD systems. Contact us at info@meaglow.com for more information.