Our Chief Scientist, Dr. K. Scott Butcher, will be giving a talk about hollow cathode plasma sources at the virtual 2021 SVC Technon. Dr. Butcher’s talk will occur on May 7th 2021 at 1:00 pm in track B, find it here https://svc.swoogo.com/confreg/agenda, the talk is entitled “Aluminum Hollow Cathode Gas Plasma Sources for Atomic Layer Deposition”.
After explaining the advantages of hollow cathode plasma sources, some new results for aluminum hollow cathodes will be provided. Aluminum sources may be important because it is compatible with silicon processes. Here the road to an operational 12″ diameter 3000 watt aluminum plasma source (pictured below) is described.
