#SiliconNitride | Meaglow Hollow Cathode Plasma Sources

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Hanyang University lead a group who compare ALD silicon nitride grown...

MeaglowAdmin - 19 July 2023 0

UT Dallas report more high-quality Silicon Nitride grown with one of...

MeaglowAdmin - 22 January 2021 0

New Hollow Cathode Plasma Source Designs Provide Better Quality Films

MeaglowAdmin - 7 March 2019 0

Caltech Convert to Hollow Cathode for Better Quality Nitride Layers

MeaglowAdmin - 24 September 2018 0

UT Dallas Lower Silicon Nitride Leakage Currents with Meaglow Hollow Cathode...

MeaglowAdmin - 16 July 2018 0