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Tag: #SiliconNitride

Hanyang University lead a group who compare ALD silicon nitride grown by hollow cathode and ICP plasma sources
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Hanyang University lead a group who compare ALD silicon nitride grown by hollow cathode and ICP plasma sources

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UT Dallas report more high-quality Silicon Nitride grown with one of their hollow cathode plasma source
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UT Dallas report more high-quality Silicon Nitride grown with one of their hollow cathode plasma source

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New Hollow Cathode Plasma Source Designs Provide Better Quality Films
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New Hollow Cathode Plasma Source Designs Provide Better Quality Films

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Caltech Convert to Hollow Cathode for Better Quality Nitride Layers
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Caltech Convert to Hollow Cathode for Better Quality Nitride Layers

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UT Dallas Lower Silicon Nitride Leakage Currents with Meaglow Hollow Cathode Plasma Source
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UT Dallas Lower Silicon Nitride Leakage Currents with Meaglow Hollow Cathode Plasma Source

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