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Hanyang University lead a group who compare ALD silicon nitride grown by hollow cathode and ICP plasma sources
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Hanyang University lead a group who compare ALD silicon nitride grown by hollow cathode and ICP plasma sources

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Meaglow UHV Hollow Cathode Plasma Source to Replace Sapphire ICP Source for European Customer
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Meaglow UHV Hollow Cathode Plasma Source to Replace Sapphire ICP Source for European Customer

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UT Dallas Lower Silicon Nitride Leakage Currents with Meaglow Hollow Cathode Plasma Source
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UT Dallas Lower Silicon Nitride Leakage Currents with Meaglow Hollow Cathode Plasma Source

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New company white paper on hollow cathode plasma sources
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New company white paper on hollow cathode plasma sources

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