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Excellent Results for High Aspect Ratio (32:1) TiN plasma deposition using hollow cathode
Meaglow News

Excellent Results for High Aspect Ratio (32:1) TiN plasma deposition using hollow cathode

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High Radical Flux Hollow Cathode Shows Another Advantage for ALD Film Growth Over Old Legacy Plasma Sources
Meaglow News

High Radical Flux Hollow Cathode Shows Another Advantage for ALD Film Growth Over Old Legacy Plasma Sources

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Caltech Convert to Hollow Cathode for Better Quality Nitride Layers
Meaglow News

Caltech Convert to Hollow Cathode for Better Quality Nitride Layers

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