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Hanyang University lead a group who compare ALD silicon nitride grown by hollow cathode and ICP plasma sources
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Hanyang University lead a group who compare ALD silicon nitride grown by hollow cathode and ICP plasma sources

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Meaglow Paper on Carbon Reduction in GaN Released
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Meaglow Paper on Carbon Reduction in GaN Released

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December Visit to Caltech
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December Visit to Caltech

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Excellent Optical Results for GaN grown at 200 C by Hollow Cathode Plasma Assisted ALD
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Excellent Optical Results for GaN grown at 200 C by Hollow Cathode Plasma Assisted ALD

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Caltech Convert to Hollow Cathode for Better Quality Nitride Layers
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Caltech Convert to Hollow Cathode for Better Quality Nitride Layers

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UT Dallas Lower Silicon Nitride Leakage Currents with Meaglow Hollow Cathode Plasma Source
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UT Dallas Lower Silicon Nitride Leakage Currents with Meaglow Hollow Cathode Plasma Source

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New Plasma Source for University of Connecticut
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New Plasma Source for University of Connecticut

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Boston College converts it’s thermal ALD with a Hollow Cathode Plasma Source
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Boston College converts it’s thermal ALD with a Hollow Cathode Plasma Source

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