Series 16Hollow Cathode

The Series 16 Mini Plasma Source enabling research at the laboratory scale.

Brochure

FEATURES

The Series 16 is the result of a mini plasma source developed for NASA Goddard. This version is based on NW 16 fittings. The Series 16 is a compact alternative suitable for small research systems. A low cost RF power supply solution can also be supplied by Meaglow Ltd. This includes a 13.56 MHz amplifier (27.12 MHz is also possible), a linear amplifier, a power meter and manual match box, plus cabling. 

  • Max. 80 watt operation continuously, up to 100 watt in pulse mode.
  • No water cooling. The system can get hot and present a heat hazard, air cooling can moderate this.
  • Suitable for 2" to 4" wafers and smaller test samples.
  • Oxides, nitrides, etc.
  • Hollow cathode technology with low oxygen contamination.
  • Cost effective.
  • High density of up to 10e+12 cm-3 or higher dependent on conditions.
  • Wide range of operating pressures (eg. from < 200 mTorr to > 10 Torr).
  • Improved growth per cycle for many material systems.

Call or Text :

+1 807-252-4391

Office Hours:

Mon - Fri : 9:00 - 5:00

E-mail us:

info@meaglow.com