Series 16Hollow Cathode

The Series 16 Mini Plasma Source enabling research at the laboratory scale.

Brochure

FEATURES

The Series 16 is the result of a mini plasma source developed for NASA Goddard. This version is based on NW 16 fittings. The Series 16 is a compact alternative suitable for small research systems. A low cost RF power supply solution can also be supplied by Meaglow Ltd. This includes a 13.56 MHz amplifier (27.12 MHz is also possible), a linear amplifier, a power meter and manual match box, plus cabling. 

  • Max. 80 watt operation continuously, up to 100 watt in pulse mode.
  • No water cooling. The system can get hot and present a heat hazard, air cooling can moderate this.
  • Suitable for 2" to 4" wafers and smaller test samples.
  • Oxides, nitrides, etc.
  • Hollow cathode technology with low oxygen contamination.
  • Cost effective.
  • High density of up to 10e+12 cm-3 or higher dependent on conditions.
  • Wide range of operating pressures (eg. from < 200 mTorr to > 10 Torr).
  • Improved growth per cycle for many material systems.

Contact us at info@meaglow.com to inquire about pricing and to address your individual requirements.

Conversions of existing systems is also possible, and we provide some white papers for the more common conversions that we have performed.

Call or Text :

+1 807-252-4391

Office Hours:

Mon - Fri : 9:00 - 5:00

E-mail us:

info@meaglow.com