Prof. Paul Ragogna’s Chemistry group at the University of Western Ontario are progressing their custom made ALD system, which features a Meaglow 3.375″ UHV series hollow cathode plasma source at the top (see above picture). Their first plasma was struck this week.
Two weeks ago, Meaglow also sent a signal conditioning box, which has allowed the Ragogna ALD system to interface with the Seren RF power generator used to power the hollow cathode. The signal conditioning box was field certified prior to sending to the University and features a fast solid state relay for turning the RF power on and off, while a separate potentiometer controls the RF power level while the generator is under analog control.
