Hollow Cathode Plasma Source to Linköping University

0
1779

A series 50 hollow cathode plasma source on loan for trial to Prof. Henrik Pedersen’s group at Linköping University, Sweden, has been purchased by the group for use on a new deposition system where the plasma source will be used for electron irradiation experiments. An earlier version of such a deposition system has been in use at the University for some time, however this is an upgraded system that now includes the Meaglow hollow cathode. This particular plasma source has the low pressure option that allows operation down to around 10-25 mTorr, depending on the gas type. Hopefully we’ll see lots of publications from Prof. Pedersen and his students!