Meaglow is developing the next generation of equipment to improve your deposition results.

Meaglow was founded in 2009, and has worked to develop new methodologies and equipment for semiconductor deposition. In 2012, Meaglow launched the first of its hollow cathode plasma sources, which have been instrumental in reducing oxygen contamination in nitride films for the ALD community resulting in some of the best layers grown to date. Interest in the plasma source has now grown to the point where Meaglow has been asked to supply whole ALD/ALE systems with its newest plasma source designs. The first such system has already been delivered.

Dr. Scott Butcher

Cheif Scientist

Meaglow was founded by Dr. Scott Butcher, with over 20 years of nitride semiconductor, plasma and deposition equipment experience; more than 100 referred journal and conference papers published, Dr. Butcher is an expert and pioneer in the industry. Holding eight patent families globally and being involved in three prior start up companies in addition to Meaglow, Scott’s prior and present technology developments continue to lead the way toward the next generation of deposition equipment.

Estrella Borja, Msc

Research Technician

Estrella's experience with thin films coatings, plasma, sputtering and co-sputtering systems brings to the company advantages in research. As an Aeronautical Engineer with master's in Materials Science Estrella has authored and co-authored numerous articles in the field of thin films deposited by sputtering. Estrella's expertise contributes to the development of our research projects and custom equipment.

Vasil Georgiev, MSc

Mechanical Engineer

Vasil's professional experience ranges widely from thermodynamics and machine design to the cutting edge technology in the field of semiconductors. As mechanical engineer, Vasil has co-authored numerous articles in the field of semiconductor research and is a fundamental link in design and development of our custom-made, state-of-the-art products.

Dimka Georgieva, MSc

Research Assistant

Dimka brings value to the company with her manufacturing and laboratory experience and in-depth knowledge of material science. With her bachelor’s degree in chemistry and master’s in biology Dimka contributes further with excellent critical thinking abilities and very effective research skills.


Scott Butcher at Carleton University 9th Annual Nano-Ontario Conference.

Our Mission

Meaglow has been selling its gas plasma sources to the semiconductor industry, replacing legacy sources that were less than optimum for current applications. The company has a unique set of designs that have greatly reduced oxygen contamination problems and provide a higher flux of active plasma species. Sales have been made to such high-level customers as the NASA Jet Propulsion Laboratories, U.S. Naval Research, and Lawrence Berkeley National Laboratories, among many others. Over one hundred Meaglow designed and built plasma sources have now been distributed to fifteen different countries.

Our success is strongly related to the company’s location in Thunder Bay, Ontario, an industrial city with excess machine shop capability. The company is able to rapidly prototype and produce new plasma source designs in under a month in many cases. For the current emergency we have a plasma system that is already on hand and ready to use for related sterilization tests.

GET BETTER PERFORMANCE FROM YOUR ALD SYSTEM