Scott Butcher at Carleton University 9th Annual Nano-Ontario Conference.
Meaglow is developing the next generation of equipment to improve your deposition results.
Meaglow was founded in 2009, and has worked to develop new methodologies and equipment for semiconductor deposition. In 2012, Meaglow launched the first of its hollow cathode plasma sources, which have been instrumental in reducing oxygen contamination in nitride films for the ALD community resulting in some of the best layers grown to date. Interest in the plasma source has now grown to the point where Meaglow has been asked to supply whole ALD/ALE systems with its newest plasma source designs. The first such system has already been delivered.

Dr. Scott Butcher
Cheif Scientist
Meaglow was founded by Dr Scott Butcher, with over 20 years of nitride semiconductor, plasma and deposition equipment experience; more than 100 referred journal and conference papers published, Dr. Butcher is an expert and pioneer in the industry. Holding eight patent families globally and being involved in three prior start up companies in addition to Meaglow, Scott’s prior and present technology developments continue to lead the way toward the next generation of deposition equipment.
Vasil Georgiev, M.Sc
Mechanical Engineer
Vasil's professional experience ranges widely from thermodynamics and machine design to the cutting edge technology in the field of semiconductors. As mechanical engineer, Vasil has co-authored numerous articles in the field of semiconductor research and is a fundamental link in design and development of our custom-made, state-of-the-art products.
Estrella Borja, M.Sc
Materials and Process Engineer
Estrella's experience with thin films coatings, plasma, sputtering and co-sputtering systems brings to the company advantages in research. As an Aeronautical Engineer with master's in Materials Science Estrella has authored and co-authored 4 articles in the field of thin films deposited by sputtering. Estrella's expertise contributes to the development of our research projects and custom equipment.
Daniel Castro, M.Sc
Electronic Engineer
Daniel is an experienced Electronic Engineer with a Master’s degree in Electronics, focused on turning complex technical challenges into efficient and integrated solutions. His work focuses on hardware and software integration, he actively participates in the design, optimization, and implementation of advanced technological solutions across diverse engineering projects.
Dimka Georgieva, M.Sc
Research AssistantDimka brings value to the company with her manufacturing and laboratory experience and in-depth knowledge of material science. With her bachelor’s degree in chemistry and master’s in biology Dimka contributes further with excellent critical thinking abilities and very effective research skills.
Sen Mathew
Electrical Engineering Technologist
Sen is an Electronics and Embedded Systems Specialist focused on power, RF, and control systems for advanced plasma technologies. He has contributed to safety-certified PEALD systems at NASA’s Goddard Space Flight Center and RF plasma power solutions supporting semiconductor research with Lam Research.
Dr. Saba Khodavandegar
Scientific Researcher, Material Science
Saba is a Materials Scientist with a Ph.D. specializing in sustainable polymer systems and advanced material characterization. At Meaglow, she applies her expertise in experimental design and analytical techniques to evaluate materials, interpret complex data, and optimize processes for reliable, high-quality performance.