Series 50Hollow Cathode

The Series 50 is one of our most popular hollow cathode plasma sources. It is commonly used for ALD, but also for oxidation and PECVD applications.

Brochure

FEATURES

Mounted on an NW50 (KF50) vacuum flange, the 50 series Hollow Cathode source is capable of being housed in an NW50 nipple. Widely used for ALD, it features:

  • 300 or 600 Watt RF or DC operation.
  • 316 Stainless steel cathode construction (other materials on demand) water cooled.
  • Replaceable cathode.
  • Wide range of gas usage.
  • Low oxygen contamination (no dielectric windows).
  • Low cost.
  • High electron density – similar to or higher than inductively coupled and microwave plasma sources.
  • Wide range of operating pressures (eg. from 100 mTorr to >10 Torr).
  • Low plasma damage.

Contact us at info@meaglow.com to inquire about pricing and to address your individual requirements.

SERIES 50 IN OPERATION

 

Conversions of existing systems is also possible, and we provide some white papers for the more common conversions that we have performed.

Call or Text :

+1 807-252-4391

Office Hours:

Mon - Fri : 9:00 - 5:00

E-mail us:

info@meaglow.com